The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 04, 2008
Filed:
Jul. 03, 2006
Chang-hoon Choi, Suwon-si, KR;
Hee-soo Pyun, Suwon-si, KR;
Hwa-sub Shim, Suwon-si, KR;
Ho-seok Choi, Suwon-si, KR;
Dong-seok Baek, Suwon-si, KR;
Chang-hoon Choi, Suwon-si, KR;
Hee-soo Pyun, Suwon-si, KR;
Hwa-sub Shim, Suwon-si, KR;
Ho-seok Choi, Suwon-si, KR;
Dong-seok Baek, Suwon-si, KR;
Samsung Electronics Co., Ltd, Suwon-si, KR;
Abstract
An apparatus to inspect a TFT substrate including a gate line, a data line crossed with the gate line and insulated from the gate line, a TFT disposed at an intersection of the gate line and the data line, and a pixel electrode connected to the TFT includes a vacuum chamber, a stage disposed in the vacuum chamber and on which the TFT substrate is settled, an electron beam generator disposed over the stage, a gate driving part to apply a gate-on voltage to the gate line to turn on the TFT, a signal detector connected to the data line and to sense an electric signal from the pixel electrode, and a controller to control the gate driving part and the electron beam generator so that a electron beam is irradiated to the pixel electrode while the TFT is turned on.