The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 04, 2008
Filed:
Mar. 17, 2005
Applicants:
Scott Jeffrey Weigel, Allentown, PA (US);
Jean Louise Vincent, Bethlehem, PA (US);
Sarah Kathryn Coulter, Allentown, PA (US);
James Edward Macdougall, New Tripoli, PA (US);
Inventors:
Scott Jeffrey Weigel, Allentown, PA (US);
Jean Louise Vincent, Bethlehem, PA (US);
Sarah Kathryn Coulter, Allentown, PA (US);
James Edward MacDougall, New Tripoli, PA (US);
Assignee:
Air Products and Chemicals, Inc., Allentown, PA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/469 (2006.01);
U.S. Cl.
CPC ...
Abstract
This invention relates to an improvement in a deposition process for producing low dielectric films having a dielectric constant of 3, preferably <2.7 and lower. The process comprises the steps: