The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 04, 2008
Filed:
Dec. 13, 2004
Rongjing Zhang, Pasadena, CA (US);
Guruswami Ravichandran, Arcadia, CA (US);
Doron Shilo, Pasadena, CA (US);
Kaushik Bhattacharya, Pasadena, CA (US);
Rongjing Zhang, Pasadena, CA (US);
Guruswami Ravichandran, Arcadia, CA (US);
Doron Shilo, Pasadena, CA (US);
Kaushik Bhattacharya, Pasadena, CA (US);
California Institute of Technology, Pasadena, CA (US);
Abstract
The present invention relates to the field measuring the mechanical response of micro-electro-mechanical systems. More specifically, the present invention pertains to a method and apparatus that allows the direct control of the load applied to a Micro-Electro-Mechanical System in order to measure the mechanical response. The system comprises a loading sub-system, a displacement measurement sub-system, and an optional observation sub-system.