The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 28, 2008
Filed:
Jul. 07, 2006
Applicants:
Knud Reuter, Krefeld, DE;
Jörg Sundermeyer, Marburg, DE;
Alexei Merkoulov, Freiburg, DE;
Wolfgang Stolz, Marburg, DE;
Kerstin Volz, Dautphetal, DE;
Michael Pokoj, Fernwald, DE;
Thomas Ochs, Kirchheim-Betziesdorf, DE;
Inventors:
Knud Reuter, Krefeld, DE;
Jörg Sundermeyer, Marburg, DE;
Alexei Merkoulov, Freiburg, DE;
Wolfgang Stolz, Marburg, DE;
Kerstin Volz, Dautphetal, DE;
Michael Pokoj, Fernwald, DE;
Thomas Ochs, Kirchheim-Betziesdorf, DE;
Assignee:
H.C. Starck GmbH, , DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05D 5/12 (2006.01); C07F 517/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
Tantalum and niobium compounds having the general formula (I) and their use for the chemical vapour deposition process are described: wherein