The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 28, 2008

Filed:

Apr. 06, 2005
Applicants:

Jes Asmussen, East Lansing, MI (US);

Timothy Grotjohn, Okemos, MI (US);

Shengxi Zuo, East Lansing, MI (US);

Kadek W. Hemawan, East Lansing, MI (US);

Inventors:

Jes Asmussen, East Lansing, MI (US);

Timothy Grotjohn, Okemos, MI (US);

Shengxi Zuo, East Lansing, MI (US);

Kadek W. Hemawan, East Lansing, MI (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23F 1/00 (2006.01); H01L 21/306 (2006.01); B23K 1/00 (2006.01); B23K 3/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A miniature microwave plasma torch apparatus () is described. The microwave plasma torch apparatus () is used for a variety of applications where rapid heating of a small amount of material is needed. The miniature microwave plasma torch apparatus () operates near or at atmospheric pressure for use in materials processing. The apparatus () provides a wide range of flow rates so that discharge properties vary from diffusional flow of radicals for gentle surface processing to high velocity, approaching supersonic, torch discharges for cutting and welding applications. The miniature microwave plasma torch apparatus () also has a very small materials processing spot size.


Find Patent Forward Citations

Loading…