The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 21, 2008
Filed:
Jun. 30, 2006
Hirotsugu Kaihori, Kyoto, JP;
Hirotsugu Kaihori, Kyoto, JP;
Abstract
A measuring optical system for emitting and receiving light is fixedly installed in a ceiling portion of a measuring device, and a wafer holding part for supporting a semiconductor wafer is provided in a bottom portion of the measuring device. A support table is horizontally laid between support pins of the wafer holding part, and a calibration standard member for calibration is placed on an upper surface of the support table. When a semiconductor wafer is supported by the support pins, light emerging from the measuring optical system impinges upon the semiconductor wafer, and the reflection intensity of the light is measured. When no semiconductor wafer is supported by the support pins, light emerging from the measuring optical system impinges upon the calibration standard member, whereby the calibration can be done at any time.