The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 21, 2008
Filed:
Jan. 12, 2007
David M. Burtner, Belmont, MA (US);
Scott A. Townsend, Fort Collins, CO (US);
Daniel E. Siegfried, Fort Collins, CO (US);
David M. Burtner, Belmont, MA (US);
Scott A. Townsend, Fort Collins, CO (US);
Daniel E. Siegfried, Fort Collins, CO (US);
Veeco Instruments, Inc., Fort Collins, CO (US);
Abstract
An ion source has a removable anode assembly that is separable and from a base assembly to allow for ease of servicing the consumable components of the anode assembly. Such consumables may include a gas distributor, a thermal control plate, an anode, and one or more thermal transfer sheets interposed between other components. A pole piece and a cathode may also be part of the anode assembly. The anode assembly may be attached to the base assembly via the pole piece.