The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7439126 B1

PDF
Full Text
Expired
Date of Patent:
Oct. 21, 2008

Filed:

Nov. 20, 2006
Applicant:

Keiji Kuroki, Tokyo, JP;

Inventor:

Keiji Kuroki, Tokyo, JP;

Assignee:

Elpida Memory, Inc., Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/8234 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method for manufacturing a semiconductor memory having a memory cell selection transistor and a capacitor, comprises a step of forming a polysilicon plug having a large-diameter portion on a side of the capacitor, a step of forming a hole reaching the large-diameter portion by etching an insulating film formed on the large-diameter portion using the large-diameter portion as an etching stopper layer, and a step of forming a conductive film inside the hole so as to serve as an electrode for the capacitor.


Find Patent Forward Citations

Kuroki, Keiji. (2008). Method for manufacturing semiconductor memory (U.S. Patent No. 7439126). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7439126

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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