The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 14, 2008
Filed:
Jul. 07, 2006
Koichi Sentoku, Kawachi-gun, JP;
Gaku Takahashi, Utsunomiya, JP;
Hideki Ina, Toshima-ku, JP;
Yoshinori Miwa, Tsunomiya, JP;
Koichi Sentoku, Kawachi-gun, JP;
Gaku Takahashi, Utsunomiya, JP;
Hideki Ina, Toshima-ku, JP;
Yoshinori Miwa, Tsunomiya, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
An imaging optical system for imaging a pattern of an object plane onto an image plane includes a first imaging optical system for imaging at a first imaging position, the first imaging optical system having a magnification α in a vacuum atmosphere, and a second imaging optical system for imaging at a second imaging position, the second imaging optical system having a magnification β in the vacuum atmosphere, wherein when an environment in which the imaging optical system is placed changes from the vacuum atmosphere to an air atmosphere or vise versa, a direction of the first imaging position that moves along an optical axis is opposite to a direction of the second imaging position that moves along the optical axis.