The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 14, 2008
Filed:
Dec. 02, 2004
Masao Naito, Kyoto, JP;
Hideki Fujita, Kyoto, JP;
Masao Naito, Kyoto, JP;
Hideki Fujita, Kyoto, JP;
Nissin Ion Equipment Co., Ltd., Kyoto, JP;
Abstract
An ion beam apparatus comprises an ion sourcewhich extracts an ion beama mass separation electromagnetwhich separates an ion beamof desired mass from the ion beamextracted from the ion sourcea scannerwhich scans the injected ion beamwith a given scan center as center within a given scan surface, an electrostatic deflectorwhich deflects the ion beam through 90° so that an ion beam of desired energy in said ion beam travels in a direction perpendicular to said scan surface within a circular-arc-shaped deflection zone centered on the scan center, and a scanning mechanismwhich retains a targetand which mechanically, reciprocally moves the targetin a direction in which the target crosses the ion beam passed from the electrostatic deflectorat a given angle.