The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 14, 2008
Filed:
Sep. 14, 2006
Applicant:
Masaru Matsushima, Hitachinaka, JP;
Inventor:
Masaru Matsushima, Hitachinaka, JP;
Assignee:
Hitachi High-Technologies Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/20 (2006.01);
U.S. Cl.
CPC ...
Abstract
An electron microscope is disclosed, wherein a specimen stage includes a base having an X-slide guide member, a center table adapted to move along the X-slide guide member, and an X rod for driving the center table. A gap is formed in the coupling between the guide unit of the center table and the X rod. A control unit performs the position control operation to monitor the measurement of a position detector such as a laser interferometer, stop driving the center table at a designated stop position, and separate the table and the X rod from each other using the gap.