The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 07, 2008
Filed:
Jul. 07, 2005
Joseph D Tobiason, Woodinville, WA (US);
David W Sesko, Woodinville, WA (US);
Benjamin K Jones, Seattle, WA (US);
Michelle M Milvich, Seattle, WA (US);
Vidya Venkatachalam, Belleview, WA (US);
Joseph D Tobiason, Woodinville, WA (US);
David W Sesko, Woodinville, WA (US);
Benjamin K Jones, Seattle, WA (US);
Michelle M Milvich, Seattle, WA (US);
Vidya Venkatachalam, Belleview, WA (US);
Mitutoyo Corporation, Kanagawa, JP;
Abstract
A method of determining an amount of tilt may include projecting at least two coherent wavefronts toward a target surface, the wavefronts reflecting from the target surface to create an interference fringe pattern on a detector, and transmitting a beam toward the target surface, the transmitted beam reflecting from the target surface to form a beam spot on the detector. A fringe pitch indicative of a distance to the target surface may be determined based on the interference fringe pattern. A displacement on the detector of the beam spot, relative to a nominal location of the beam spot when the target surface is at a nominal angle of incidence relative to the beam, may be determined. The amount of tilt of the target surface relative to the nominal angle of incidence, may be determined based on the displacement of the beam spot and the determined fringe pitch.