The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 07, 2008
Filed:
Feb. 16, 2007
David R. Peale, San Diego, CA (US);
Dieter E. Mueller, Cupertino, CA (US);
Kyle A. Brown, San Diego, CA (US);
David R. Peale, San Diego, CA (US);
Dieter E. Mueller, Cupertino, CA (US);
Kyle A. Brown, San Diego, CA (US);
KLA-Tencor Corporation, San Jose, CA (US);
Abstract
Runout characterization is performed on a moving body by positioning a light source and optical sensor at a nominal distance from the moving body, with a beam directed from the light source against a surface of the moving body. The reflected light is detected at a sampling rate with the optical sensor as the moving body moves, and a data stream of the measurements over time is stored. In the case where an interferometer is used as the optical sensor, relative distance measurements are made. The data stream is analyzed to detect repeating signatures in the data stream, where the signatures represent features on the surface of the moving body. At least one of the features is selected as a reference, and the data stream is processed into segments based on the reference, where each segment represents one period of motion of the moving body. The data segments are overlaid on top of each other to produce ordered sets of data points within the segments. Each ordered set of data points is individually averaged and reported as repeatable runout. The average of each ordered set of data points is subtracted from the data points of each set to produce normalized ordered sets of data points. The variances within the normalized ordered sets of data points are reported as a measure of the non-repeatable runout of the moving body.