The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 07, 2008
Filed:
Aug. 27, 2004
Souichi Toyama, Ebina, JP;
Haruaki Otsuki, Tsuchiura, JP;
Atsushi Sakamoto, Tsuchiura, JP;
Kenta Seki, Tsuchiura, JP;
Yaichi Okubo, Ebina, JP;
Souichi Toyama, Ebina, JP;
Haruaki Otsuki, Tsuchiura, JP;
Atsushi Sakamoto, Tsuchiura, JP;
Kenta Seki, Tsuchiura, JP;
Yaichi Okubo, Ebina, JP;
Hitachi Via Mechanics, Ltd., Ebina-shi, JP;
Abstract
A scanner system includes a servo control unit. A rotation angle of a rotating shaft supporting a mirror is detected, and an error of the detected value with respect to a commanded value is integrated by an integral compensator so that the detected value is able to track the commanded value. A tracking error proportional compensator is disposed in parallel with the integral compensator so as to add a correction value proportional to the error to the integrated value of the error. A plurality of gains are prepared for each of the integral compensator, the tracking error proportional compensator, a detected value proportional compensator and a detected value differential compensator of the servo control unit. Each gain is changed in accordance with a travel angle of the commanded value. Thus, the mirror can be positioned quickly so that the machining speed can be improved.