The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 07, 2008
Filed:
Jan. 08, 2007
Koji Eriguchi, Ritto, JP;
Susumu Matsumoto, Takatsuki, JP;
Koji Eriguchi, Ritto, JP;
Susumu Matsumoto, Takatsuki, JP;
Matsushita Electric Industrial Co., Ltd., Osaka, JP;
Abstract
At least a laminate of a gate insulating filmand a gate electrodeand an active regionare formed on a silicon substrate, and an underlying interlayer insulating filmis further formed. Then, a conductorconnected to the gate electrode, and a conductorthat is a dummy conductor and is connected to the active regionare formed simultaneously on the underlying interlayer insulating film. Thereafter, an interlayer insulating filmis formed on the underlying interlayer insulating filmby a plasma process. At this time, charging current from a plasmais emitted through the conductor, which is a dummy conductor.