The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 30, 2008

Filed:

Jun. 08, 2005
Applicants:

Shuichi Kamiyama, Kawasaki, JP;

Yutaka Nishitsuji, Kawasaki, JP;

Inventors:

Shuichi Kamiyama, Kawasaki, JP;

Yutaka Nishitsuji, Kawasaki, JP;

Assignee:

Mitutoyo Corporation, Kawasaki-shi, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 11/14 (2006.01); G01B 11/28 (2006.01);
U.S. Cl.
CPC ...
Abstract

A stage apparatus () includes a stage glass () having on an upper surface a stage surface () of a substantially flat plane on which a predetermined workpiece (W) is set, a plane light emitter () with a flat plane, which is provided to substantially all over a lower surface of the stage glass () and illuminates the workpiece (W) with contour illumination through the stage glass (), and a supporting section (), which supports at plurality of points on a lower face side of the plane light emitter () and adjusts the flatness of the stage surface () by adjusting the height at a plurality of supporting points.


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