The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 30, 2008
Filed:
Dec. 02, 2005
Brian K. Aegerter, Kalispell, MT (US);
Curt T. Dundas, Kalispell, MT (US);
Tom L. Ritzdorf, Big Fork, MT (US);
Gary L. Curtis, Kila, MT (US);
Michael Jolley, Beaverton, OR (US);
Brian K. Aegerter, Kalispell, MT (US);
Curt T. Dundas, Kalispell, MT (US);
Tom L. Ritzdorf, Big Fork, MT (US);
Gary L. Curtis, Kila, MT (US);
Michael Jolley, Beaverton, OR (US);
Semitool, Inc., Kalispell, MT (US);
Abstract
A method for rinsing and drying a workpiece includes placing the workpiece into a chamber and spinning the workpiece. A rinsing fluid, such as water, is applied onto the workpiece through a first outlet in the chamber, with the rinsing fluid moving outwardly towards the edge of the workpiece via centrifugal force, to rinse the workpiece. A drying fluid, such as an alcohol vapor, is applied onto the workpiece through the first outlet, with the drying fluid moving outwardly towards the edge of the workpiece via centrifugal force, to dry the workpiece. The drying fluid advantageously follows a meniscus of the rinsing fluid across the workpiece surface. The rinsing fluid, or the drying fluid, or both fluids, may be applied near or at a central area of the workpiece.