The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 23, 2008
Filed:
Mar. 04, 2005
Storrs T. Hoen, Brisbane, CA (US);
Mark A. Unkrich, Emerald Hills, CA (US);
William R. Trutna, Atherton, CA (US);
John D. Larson, Iii, Palo Alto, CA (US);
Richard C Ruby, Menlo Park, CA (US);
Graham M. Flower, San Jose, CA (US);
Annette Grot, Cupertino, CA (US);
Storrs T. Hoen, Brisbane, CA (US);
Mark A. Unkrich, Emerald Hills, CA (US);
William R. Trutna, Atherton, CA (US);
John D. Larson, III, Palo Alto, CA (US);
Richard C Ruby, Menlo Park, CA (US);
Graham M. Flower, San Jose, CA (US);
Annette Grot, Cupertino, CA (US);
Avago Wireless IP Pte Ltd, Singapore, SG;
Abstract
An apparatus and method for measuring a target environmental variable (TEV) that employs a film-bulk acoustic resonator with motion plate. The film-bulk acoustic resonator (FBAR) includes an acoustic reflector formed in an FBAR wafer and a surface. A first electrode is formed on the surface of the acoustic reflector and has a surface. A piezoelectric layer is formed on the surface of the first electrode and has a surface. A second electrode is formed on the surface of the piezoelectric layer. A motion plate is suspended in space at a predetermined distance relative to the surface of the second electrode and is capacitively coupled to the FBAR.