The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 23, 2008
Filed:
Jun. 30, 2003
Yezdi N. Dordi, Palo Alt, CA (US);
Joseph J. Stevens, San Jose, CA (US);
H. Peter W. Hey, Sunnyvale, CA (US);
Donald J. K. Olgado, Palo Alto, CA (US);
Yezdi N. Dordi, Palo Alt, CA (US);
Joseph J. Stevens, San Jose, CA (US);
H. Peter W. Hey, Sunnyvale, CA (US);
Donald J. K. Olgado, Palo Alto, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
An apparatus comprising an electrolyte cell, an anode, and a porous rigid diffuser. The electrolyte cell is configured to receive a substrate to have a metal film deposited thereon. An anode is contained within the electrolyte cell. A porous rigid diffuser is connected to the electrolyte cell and extends across the electrolyte cell. The diffuser is positioned between a location that the substrate is to be positioned when the metal film is deposited thereon and the anode.