The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 16, 2008
Filed:
Aug. 26, 2005
Kevin J. Nordquist, Gold Canyon, AZ (US);
Jeffrey H. Baker, Chandler, AZ (US);
William J. Dauksher, Mesa, AZ (US);
Kevin J. Nordquist, Gold Canyon, AZ (US);
Jeffrey H. Baker, Chandler, AZ (US);
William J. Dauksher, Mesa, AZ (US);
Motorola, Inc., Schaumburg, IL (US);
Abstract
A lithographic template, a method of forming the lithographic template and a method for forming devices with the lithographic template is provided. The lithographic template () and the method of making comprises forming a transparent conductive layer () over a substrate (). A SiCN layer () is formed over the transparent conductive layer (), and a patterning layer () formed on the SiCN layer (). The SiCN layer () is converted to an SiOlayer by applying an Oplasma (). The SiOlayer prevents damage to the transparent conductive layer () during cleaning and provides a binding mechanism for the imprint release coating.