The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 26, 2008
Filed:
Jan. 13, 2004
Detlef Michelsson, Wetzlar-Naunheim, DE;
Detlef Michelsson, Wetzlar-Naunheim, DE;
Leica Microsystems Semiconductor GmbH, Wetzlar, DE;
Abstract
The invention relates to a method and a device for the optical inspection of the surface of semi-conductor substrate. An image () is captured on the surface of the semi-conductor substrate which is covered with a thin layer. Said image is made of a plurality of pixels having associated colour values and intensities. The frequency distribution of pixels having equal colour co-ordination values is calculated () from the colour values in a colour range (), said colour range having a colour intensity and colour co-ordinates. The thus calculated frequency distribution is used () to compare a second correspondingly calculated frequency distribution or a variable derived therefrom. According to the invention, the colour shift () and/or differences () in the colour distribution are determined according to fluctuations in the intensity of the illumination. The invention also relates to a method and a device for producing a structured semi-conductor substrate by using the above-mentioned method or the above-mentioned device and software for carrying out said method.