The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 26, 2008
Filed:
Nov. 06, 2006
Applicants:
Hernes Jacobs, Eindhoven, NL;
Henrikus Herman Marie Cox, Eindhoven, NL;
Petrus Matthijs Henricus Vosters, Bladel, NL;
Inventors:
Hernes Jacobs, Eindhoven, NL;
Henrikus Herman Marie Cox, Eindhoven, NL;
Petrus Matthijs Henricus Vosters, Bladel, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/42 (2006.01); G03B 27/58 (2006.01); G03C 5/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A lithographic projection apparatus in which a balance mass is supported by a base frame using at least one supporting member which is coupled to both the base frame and balance mass. Free horizontal movement is provided by providing the supporting member with at least two pivot points.