The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 26, 2008
Filed:
Jun. 09, 2005
Motoaki Iwabuchi, Joetsu, JP;
Yoshitaka Hamada, Joetsu, JP;
Tsutomu Ogihara, Joetsu, JP;
Takeshi Asano, Joetsu, JP;
Takafumi Ueda, Joetsu, JP;
Motoaki Iwabuchi, Joetsu, JP;
Yoshitaka Hamada, Joetsu, JP;
Tsutomu Ogihara, Joetsu, JP;
Takeshi Asano, Joetsu, JP;
Takafumi Ueda, Joetsu, JP;
Shin-Etsu Chemical Co., Ltd., Tokyo, JP;
Abstract
A porous film-forming composition is provided comprising (A) a polymer obtained by hydrolytic condensation of a hydrolyzable silane having formula (1):R—Si—R  (1)wherein Ris a monovalent organic group or hydrogen, Ris a hydrolyzable group or a hydroxyl group and n is an integer of 0 to 3, a hydrolyzate thereof or a partial condensate thereof, with the proviso that at least one silicon compound having an organic crosslinkable group as Ris included, the polymer being capable of crosslinking reaction by the organic crosslinkable group, and (B) an organic solvent. The composition has improved storage stability, filling properties, adhesion and coating uniformity sufficient to form a sacrificial film which is dissolvable in a stripping solution.