The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 19, 2008
Filed:
May. 26, 2004
Applicants:
James R. Barnett, Jr., Austin, TX (US);
Mark K. Ekblad, San Jose, CA (US);
Jeffrey M. Parker, Cedar Park, TX (US);
Inventors:
James R. Barnett, Jr., Austin, TX (US);
Mark K. Ekblad, San Jose, CA (US);
Jeffrey M. Parker, Cedar Park, TX (US);
Assignee:
Other;
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G05B 13/02 (2006.01); G06F 19/00 (2006.01); F27B 5/14 (2006.01); H05B 3/68 (2006.01); F27D 11/00 (2006.01); A21B 1/22 (2006.01); A21B 1/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A process module tuning method characterizes a process module by gathering data using a process condition measuring device to measure process outputs while inputs are excited. The data is used to identify a dynamic process model. The dynamic process model is then be used to determine process input settings that will produce desired outputs. For multi-zone process modules, the interactions between zones may be modeled.