The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 19, 2008
Filed:
Feb. 13, 2006
Applicants:
Tony Thanh Phan, Flower Mound, TX (US);
Farris D. Malone, Richardson, TX (US);
Inventors:
Tony Thanh Phan, Flower Mound, TX (US);
Farris D. Malone, Richardson, TX (US);
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/8242 (2006.01); H01L 31/113 (2006.01);
U.S. Cl.
CPC ...
Abstract
The present invention provides method of manufacturing a metal-insulator-metal capacitor (). A method of manufacturing includes depositing a first refractory metal layer () over a semiconductor substrate (). The first refractory metal layer () over a capacitor region () of the semiconductor substrate () is removed and a second refractory metal () is deposited over the capacitor region (). Other aspects of the present invention include a metal-insulator-metal capacitor () and a method of manufacturing an integrated circuit ().