The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 12, 2008
Filed:
Jan. 11, 2006
Thomas Iffland, Jena, DE;
Thomas Iffland, Jena, DE;
Leica Microsystems CMS GmbH, Wetzlar, DE;
Abstract
An optical measurement system having a spectrophotometer and a ellipsometer is calibrated, the spectrophotometer and the ellipsometer first being calibrated independently of one another. A spectrophotometer layer thickness (d) of a specimen is then determined at an initial angle of incidence (θ) using the spectrophotometer. An ellipsometer layer thickness (d) of the specimen is then determined using the layer thickness determined with the ellipsometer. The spectrophotometer and the ellipsometer are matched to one another by varying the initial angle of incidence (θ) until the absolute value of the difference between the spectrophotometer layer thickness (d) and the ellipsometer layer thickness (d) is less than a predefined absolute value.