The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 12, 2008
Filed:
Jan. 03, 2006
Ju-hwan Jung, Seoul, KR;
Hyung-cheol Shin, Seoul, KR;
Hyoung-soo Ko, Seoul, KR;
Seung-bum Hong, Seongnam-si, KR;
Ju-hwan Jung, Seoul, KR;
Hyung-cheol Shin, Seoul, KR;
Hyoung-soo Ko, Seoul, KR;
Seung-bum Hong, Seongnam-si, KR;
Samsung Electronics Co., Ltd., Suwon, KR;
Abstract
A semiconductor probe with a resistive tip and a method of fabricating the semiconductor probe. The resistive tip doped with a first impurity includes a resistive region formed at a peak thereof and lightly doped with a second impurity opposite in polarity to the first impurity, and first and second semiconductor regions formed on sloped sides thereof and heavily doped with the second impurity. The semiconductor probe includes the resistive tip, a cantilever having an end on which the resistive tip is disposed, a dielectric layer disposed on the cantilever and covering the resistive region, and a metal shield disposed on the dielectric layer and having an opening formed at a position corresponding to the resistive region.