The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 05, 2008
Filed:
Jun. 21, 2004
Jan Jaap Kuit, Veldhoven, NL;
Petrus Rutgerus Bartray, Ysselsteyn, NL;
Dirk Jan Bijvoet, Eindhoven, NL;
Jan Frederik Hoogkamp, Breda, NL;
Jan Jaap Kuit, Veldhoven, NL;
Petrus Rutgerus Bartray, Ysselsteyn, NL;
Dirk Jan Bijvoet, Eindhoven, NL;
Jan Frederik Hoogkamp, Breda, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A lithographic apparatus having an improved transfer unit, is presented. The lithographic apparatus includes a processing unit that performs a lithographic process involving exchangeable objects in which the processing unit includes an illumination system that provides a beam of radiation, a support structure configured to support a patterning device that imparts a desired pattern to the beam of radiation, a substrate holder configured to hold a substrate, and a projection system configured to project the patterned beam onto a target portion of the substrate. The lithographic apparatus also includes a transfer unit comprising a single robot. The single robot is configured to transfer a first exchangeable object from a loading station to the processing unit and to transfer a second exchangeable object from the processing unit to a discharge station.