The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 05, 2008
Filed:
Aug. 10, 2004
Yashesh A. Shroff, Santa Clara, CA (US);
Yashesh A. Shroff, Santa Clara, CA (US);
Intel Corporation, Santa Clara, CA (US);
Abstract
In one embodiment of the present invention, intervening material layers () are recessed () relative to membrane layers () thereby providing increased surface area contact between the membranes () and support posts (). Increased surface area contact assists in reducing membrane shape changes () and defects () that can result from thermal and physical stress. In an alternative embodiment, problems related to stiction during release of a stack of membranes () is reduced by using different processes to completely remove portions of intervening material layers () between membrane layers (). The first process removes the bulk of the intervening material layer (). The second process removes the remaining portions of the intervening material layer ().