The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 05, 2008
Filed:
Aug. 08, 2003
Andrew E. Feiring, Wilmington, DE (US);
Viacheslav Alexandrovich Petrov, Hockessin, DE;
Bruce Edmund Smart, Wilmington, DE (US);
Andrew E. Feiring, Wilmington, DE (US);
Viacheslav Alexandrovich Petrov, Hockessin, DE;
Bruce Edmund Smart, Wilmington, DE (US);
E.I. du Pont de Nemours and Company, Wilmington, DE (US);
Abstract
The invention provides a polymer having (a) at least one repeat unit derived from an ethylenically unsaturated compound having at least one fluorine atom covalently attached to an ethylenically unsaturated carbon atom; and (b) at least one repeat unit derived from an ethylenically unsaturated cyclic compound of structure: (I) wherein n is 0, 1, or 2; and Rto Rare independently H; C-Calkyl or alkoxy, optionally substituted by halogen or ether oxygens; or C-Caryl. These polymers can be used in making photoresist compositions and coated substrates.