The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 05, 2008
Filed:
Jul. 25, 2005
Applicants:
Hiroki Nakamura, Ageo, JP;
Terunori Warabisako, Nishitama-gun, JP;
Masakiyo Matsumura, Kamakura, JP;
Inventors:
Hiroki Nakamura, Ageo, JP;
Terunori Warabisako, Nishitama-gun, JP;
Masakiyo Matsumura, Kamakura, JP;
Assignee:
Advanced LCD Technologies Development Center Co., Ltd., Yokohama-shi, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/20 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method of manufacturing a semiconductor device includes irradiating a region to be crystallized of a non-monocrystalline semiconductor film with laser beam modulated by an optical modulator to have light intensity distribution having a minimum light intensity line or minimum light intensity spot to crystallize the region, and heating the crystallized region by irradiating light from a flash lamp onto the crystallized region.