The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 29, 2008
Filed:
May. 03, 2007
Taichi Fujita, Tokyo, JP;
Takahiro Hokida, Tokyo, JP;
Tetsuo Hata, Tokyo, JP;
Satoshi Moriyama, Tokyo, JP;
Yoshiyuki Yokoyama, Tokyo, JP;
Taichi Fujita, Tokyo, JP;
Takahiro Hokida, Tokyo, JP;
Tetsuo Hata, Tokyo, JP;
Satoshi Moriyama, Tokyo, JP;
Yoshiyuki Yokoyama, Tokyo, JP;
Tokyo Seimitsu Co., Ltd., Tokyo, JP;
Abstract
A prober that has improved positional precision of probing without reducing throughput is disclosed. The prober comprises a probe card having a probe, a wafer stage, a stage temperature adjustment mechanism, a wafer stage movement mechanism, a movement control section, and an alignment mechanism that detects the relative position between an electrode and the probe, wherein the movement control section controls the movement mechanism so as to cause the electrode to come into contact with the probe based on the detected relative position, and the prober further comprises a plurality of temperature sensors that detect the temperatures of a plurality of portions of the prober including the wafer stage and a predicted change amount calculation section that calculates the amount of change in relative position between the electrode and the probe based on a prediction model that uses at least part of the temperatures of the plurality of portions and the temperature difference between the wafer stage and the other sections as a variable.