The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 29, 2008

Filed:

Nov. 05, 2004
Applicants:

Satoshi Kobayashi, Tokyo, JP;

Yukio Morishige, Tokyo, JP;

Inventors:

Satoshi Kobayashi, Tokyo, JP;

Yukio Morishige, Tokyo, JP;

Assignee:

Disco Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23K 26/00 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
Abstract

Disclosed herein is a processing apparatus using a laser beam, which includes a holder for holding a workpiece, and laser beam applicator for irradiating the workpiece, held by the holder, with a pulsed laser beam capable of passing through the workpiece, thereby deteriorating the workpiece. The laser beam applicator includes a pulsed laser beam oscillator and a transmitter/focuser for transmitting and focusing the pulsed laser beam oscillated by the pulsed laser beam oscillator. The transmitter/focuser focuses the pulsed laser beam, with a time difference provided, to at least two focus points that are displaced in the optical axis direction.


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