The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 22, 2008
Filed:
Aug. 03, 2006
Tina Pai-lin Ku, Hayward, CA (US);
Paul Ronald Ballintine, Pleasanton, CA (US);
Gean Hsu, Fremont, CA (US);
Jaime Sarmiento, Tracy, CA (US);
Tina Pai-Lin Ku, Hayward, CA (US);
Paul Ronald Ballintine, Pleasanton, CA (US);
Gean Hsu, Fremont, CA (US);
Jaime Sarmiento, Tracy, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
A method for testing a component configured to be installed in a plasma processing system. The method includes providing an ATAC (Automated Test and Characterization) fixture, which includes a system control software package ( SCS) that is representative of production system control software, a data manager module configured to obtain specification data from a database over a computer network, a test manager module configured to execute a set of tests designed to test the component, a SCS interface engine configured to provide the set of tests to the SCS, and a data analysis module configured to provide computer-implemented data analysis tool for analyzing test data obtained from the testing the component. The method also includes coupling the ATAC fixture to the component to enable the SCS in the ATAC fixture to test the component utilizing the set of tests and at least a portion of the specification data.