The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 22, 2008

Filed:

Oct. 13, 2005
Applicants:

Keiichi Tohyama, Yokohama, JP;

Nobuharu Noji, Zushi, JP;

Shoji Yoshikawa, Hachioji, JP;

Inventors:

Keiichi Tohyama, Yokohama, JP;

Nobuharu Noji, Zushi, JP;

Shoji Yoshikawa, Hachioji, JP;

Assignee:

Ebara Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

In an examining apparatus, an electron gun irradiates an intended position of an information recording medium with an electron beam. A stage holds the information recording medium such that the information recording medium can be moved along a rotation direction and a radial direction. A detector detects electrons which have acquired information of a surface of the information recording medium by irradiating the information recording medium with the electron beam. An image producing unit acquires an image of the surface of the information recording medium based on the electrons detected by the detector. The examining apparatus can examine as to whether or not a defect of an information recording medium such as a CD and a DVD is present, but also can examine a shape of the defect thereof. The examining apparatus can also examine an information recording medium having a large storage capacity.


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