The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 15, 2008
Filed:
Mar. 28, 2005
Tina Pai-lin Ku, Hayward, CA (US);
Paul Ronald Ballintine, Pleasanton, CA (US);
Roopa Krishnaiah-felton, Danville, CA (US);
Gean Hsu, Fremont, CA (US);
Duane Smith, Pleasanton, CA (US);
Jaime Sarmiento, Tracy, CA (US);
Tina Pai-Lin Ku, Hayward, CA (US);
Paul Ronald Ballintine, Pleasanton, CA (US);
Roopa Krishnaiah-Felton, Danville, CA (US);
Gean Hsu, Fremont, CA (US);
Duane Smith, Pleasanton, CA (US);
Jaime Sarmiento, Tracy, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
A testing arrangement for testing a plasma cluster tool having system control software (SCS) for controlling the plasma cluster tool during production. The testing arrangement includes a data manager module for obtaining, via a computer network, specification data pertaining to a component of the plasma cluster tool. The testing arrangement further includes a test manager module configured to provide a set of tests for testing the component, the set of tests incorporating data obtained in the specification data. The testing arrangement additionally includes a SCS interface engine configured to communicate the set of tests with the system control software of the plasma cluster tool, thereby enabling the SCS to execute at least a test in the set of tests to test the component.