The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 15, 2008
Filed:
Jan. 07, 2002
Applicants:
Wolfgang Singer, Aalen, DE;
Wilhelm Ulrich, Aalen, DE;
Martin Antoni, Aalen, DE;
Inventors:
Assignee:
Carl Zeiss SMT AG, Oberkochen, DE;
Primary Examiner:
Int. Cl.
CPC ...
G21K 5/04 (2006.01); G21K 1/06 (2006.01); G03B 27/42 (2006.01); G03B 27/72 (2006.01); G02B 27/10 (2006.01);
U.S. Cl.
CPC ...
Abstract
There is provided an illumination system for lithography with wavelengths of ≦193 mn. The system comprises a first optical element, which is divided into first raster elements and lies in a first plane. The first plane defines an x-direction and a y-direction, the first raster elements each have an x-direction and a y-direction with an aspect ratio, and at least two of the first raster elements have aspect ratios of different magnitude.