The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 15, 2008
Filed:
Apr. 03, 2006
David L. Halbmaier, Shorewood, MN (US);
Anthony Simpson, Savage, MN (US);
William M. Goodwin, Medway, MA (US);
Oleg P. Kishkovich, Greenville, RI (US);
Thomas B. Kielbaso, Colorado Springs, CO (US);
Frank Manganiello, Maplewood, MI (US);
David L. Halbmaier, Shorewood, MN (US);
Anthony Simpson, Savage, MN (US);
William M. Goodwin, Medway, MA (US);
Oleg P. Kishkovich, Greenville, RI (US);
Thomas B. Kielbaso, Colorado Springs, CO (US);
Frank Manganiello, Maplewood, MI (US);
Entegris, Inc., Chaska, MN (US);
Abstract
The present invention provides a standardized mechanical interface (SMIF) reticle pod that is configured to provide a controlled environment for supporting a reticle wherein the controlled environment is maintained substantially free of crystal growth causing contaminants. Accordingly, there is provided a layered filter with filter elements capable of filtering particulates and adsorbing gaseous contaminants. The filter has an inwardly facing face generally planar shaped with a surface area that is substantially half or more of the area of the reticle face. The inwardly facing face is placed in close proximity to the reticle patterned surface and has an area that is a significant fraction of the reticle patterned surface area. The SMIF pod is also provided with a purge system configured to inject a very dry gas within the controlled environment to flush the controlled environment of contaminants as well as to regenerate the filter.