The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 15, 2008
Filed:
Jul. 28, 2004
Fumihiro Gotoh, Kumamoto, JP;
Nobuaki Ishiga, Kumamoto, JP;
Toshio Araki, Kumamoto, JP;
Kazunori Inoue, Kumamoto, JP;
Hiroyasu Itoh, Kumamoto, JP;
Eiji Shibata, Kumamoto, JP;
Masanao Nabeshima, Kumamoto, JP;
Fumihiro Gotoh, Kumamoto, JP;
Nobuaki Ishiga, Kumamoto, JP;
Toshio Araki, Kumamoto, JP;
Kazunori Inoue, Kumamoto, JP;
Hiroyasu Itoh, Kumamoto, JP;
Eiji Shibata, Kumamoto, JP;
Masanao Nabeshima, Kumamoto, JP;
Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;
Abstract
A method for manufacturing thin film transistor array substrate for a liquid crystal display device-includes:—(a) forming a first metal thin film layer on a insulating substrate and forming a gate wiring and a gate electrode by a first photolithography. (b) forming a gate insulating film layer, a semiconductor film layer, an ohmic contact film layer and a second metal thin film layer, and forming the thin film transistor by a second photolithography, (c) forming an interlayer insulating film, and forming a pixel contact hole, a first contact hole and a second contact hole by a third photolithography, and (d) forming a transparent conductive film, and forming a pixel electrode by a fourth photolithography. The first metal thin film has a two-layered structure comprising a first layer made of aluminum or aluminum alloy and a second layer located on said first layer, and the second metal thin film is formed of an alloy mainly containing molybdenum.