The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 15, 2008
Filed:
Mar. 02, 2005
Romain Desplats, Toulouse, FR;
Philippe Perdu, Toulouse, FR;
Ketan J. Shah, Cupertino, CA (US);
Theodore R. Lundquist, Milpitas, CA (US);
Romain Desplats, Toulouse, FR;
Philippe Perdu, Toulouse, FR;
Ketan J. Shah, Cupertino, CA (US);
Theodore R. Lundquist, Milpitas, CA (US);
Credence Systems Corporation, Milpitas, CA (US);
Abstract
A system, apparatus, and method for analyzing photon emission data to discriminate between photons emitted by transistors and photons emitted by background sources. The analysis involves spatial and/or temporal correlation of photon emissions. After correlation, the analysis may further involve obtaining a likelihood that the correlated photons were emitted by a transistor. After correlation, the analysis may also further involve assigning a weight to individual photon emissions as a function of the correlation. The weight, in some instances, reflecting a likelihood that the photons were emitted by a transistor. The analysis may further involve automatically identifying transistors in a photon emission image.