The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 01, 2008
Filed:
Mar. 23, 2005
Applicant:
Hirofumi Hayakawa, Tokyo, JP;
Inventor:
Hirofumi Hayakawa, Tokyo, JP;
Assignee:
Advantest Corp., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H02N 13/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
The electrostatic chuckwhere pairs of electrodesandto which voltages are applied are embedded in the main body, and where a substrateis placed and held on the surface of the main body, includes a first electrode group constituted of one pair or more of electrodesarranged in a center regioninside the main body, and a second electrode group constituted of one pair or more of electrodesandarranged in outer peripheral portionsandsurrounding the center region