The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 01, 2008

Filed:

Nov. 20, 2006
Applicants:

Yoshiyuki Sonda, Tokyo, JP;

Kimiaki Oto, Tokyo, JP;

Munehisa Kato, Tokyo, JP;

Atsushi Kiyama, Yamagata, JP;

Inventors:

Yoshiyuki Sonda, Tokyo, JP;

Kimiaki Oto, Tokyo, JP;

Munehisa Kato, Tokyo, JP;

Atsushi Kiyama, Yamagata, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

The present invention provides an inspection method and an inspection apparatus which can remove influence of rear surface reflection image and inspect characteristic of a front surface shape with good accuracy by an inexpensive apparatus construction. First of all, as a stripe pattern suitable for a transparent plate-shaped object(object to be inspected), a stripe patternhaving a bright-dark pattern configured so that its reflection image produced by the front surface of the transparent plate-shaped object and its reflection image produced by a rear surface of the transparent plate-shaped object are separated in an image signal obtained by image-capturing, is determined. Thereafter, using the decided stripe patternthe front surface shape of the transparent plate-shaped objectis evaluated by an image analysis using only a reflection image of the stripe patternproduced by the transparent plate-shaped object


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