The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 01, 2008
Filed:
Jan. 24, 2003
Akio Kojima, Tokyo, JP;
Akio Kojima, Tokyo, JP;
Advantest Corp., Tokyo, JP;
Abstract
A probe card on which micro probe needles are arranged at high density and with high precision without need of a complicated structure or variation in needle height. A probe cardinstalled in a wafer tester includes a boardhaving a wiring pattern for transmitting a test signal to be impressed on a wafer under test, a built-up boardformed on the surface of the board, a comb-shaped silicon-made probe needlearranged on the built-up boardand connected to the surface wiring pattern, and a flat portionformed by plating on the surface wiring patternon the built-up boardand having a surface flattened by polishing. The probe needleis loaded on the flat portionand thus mounted on the board