The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 01, 2008
Filed:
Mar. 16, 2005
Christopher K. Ober, Ithaca, NY (US);
Ramakrishnan Ayothi, Ithaca, NY (US);
Kyung-min Kim, Chungbuk, KR;
Xiang-qian Liu, Norristown, PA (US);
Christopher K. Ober, Ithaca, NY (US);
Ramakrishnan Ayothi, Ithaca, NY (US);
Kyung-Min Kim, Chungbuk, KR;
Xiang-Qian Liu, Norristown, PA (US);
Cornell Research Foundation, Inc., Ithaca, NY (US);
Abstract
Novel classes of ionic photoacid generator (PAGs) compounds having relatively environmentally friendly anions with no perfluorooctyl sulfonate (no-PFOS) are provided and photoresist composition that comprise such compounds. The new PAGs produce a photoacid having a short or no perfluoro alkyl chain (ie., no-PFOS) attached to a variety of functional groups. The PAGs of the invention are useful as photoactive component in the chemically amplified resist compositions used for microfabrication.