The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 01, 2008
Filed:
Dec. 11, 2003
Paul R. Mchugh, Kalispell, MT (US);
Gregory J. Wilson, Kalispell, MT (US);
Daniel J. Woodruff, Kalispell, MT (US);
Nolan Zimmerman, Kalispell, MT (US);
James J. Erickson, Kalispell, MT (US);
Paul R. McHugh, Kalispell, MT (US);
Gregory J. Wilson, Kalispell, MT (US);
Daniel J. Woodruff, Kalispell, MT (US);
Nolan Zimmerman, Kalispell, MT (US);
James J. Erickson, Kalispell, MT (US);
Semitool, Inc., Kalispell, MT (US);
Abstract
Tools having mounting modules with registration systems are disclosed. The mounting module includes positioning elements for precisely locating a processing chamber and a transport system that moves workpieces to and from the processing chamber. The relative positions between positioning elements of the module are fixed so that the transport system does not need to be recalibrated when the processing chamber is removed and replaced with another processing chamber. The processing chamber includes a paddle device for agitating processing liquid at a process surface of the workpiece. The paddle device, the processing chamber, and electrodes within the processing chamber are configured to reduce the likelihood for electrical shadowing created by the paddles at the surface of the workpiece, and to account for three-dimensional effects on the electrical field as the paddles reciprocate relative to the workpiece.