The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 24, 2008
Filed:
Dec. 11, 2003
Paul R. Mchugh, Kalispell, MT (US);
Gregory J. Wilson, Kalispell, MT (US);
Daniel J. Woodruff, Kalispell, MT (US);
Nolan Zimmerman, Kalispell, MT (US);
James J. Erickson, Kalispell, MT (US);
Paul R. McHugh, Kalispell, MT (US);
Gregory J. Wilson, Kalispell, MT (US);
Daniel J. Woodruff, Kalispell, MT (US);
Nolan Zimmerman, Kalispell, MT (US);
James J. Erickson, Kalispell, MT (US);
Semitool, Inc., Kalispell, MT (US);
Abstract
Paddles and enclosures for processing microfeature workpieces are disclosed. A paddle device having multiple paddles is positioned in an enclosure to reciprocate back and forth along a generally linear path. The clearances between the paddles, the workpiece and the walls of the chamber are relatively small to increase the flow agitation at the surface of the workpiece and enhance the mass transfer process occurring there. The paddles are shaped to reduce or eliminate electrical shadowing effects created at the surface of the workpiece during electrochemical processing. Paddles on the same paddle device may have different shapes to reduce the likelihood for creating three-dimensional effects in the flow field proximate to the surface of the workpiece. The reciprocation stroke of the paddles may shift to further reduce shadowing.