The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 17, 2008
Filed:
Jul. 19, 2006
Shinichirou Yanaka, Tsukuba, JP;
Makoto Abe, Tsukuba, JP;
Shinichi Hara, Tsukuba, JP;
Naoyuki Taketomi, Tsukuba, JP;
Shinichirou Yanaka, Tsukuba, JP;
Makoto Abe, Tsukuba, JP;
Shinichi Hara, Tsukuba, JP;
Naoyuki Taketomi, Tsukuba, JP;
Mitutoyo Corporation, Kawasaki-shi, JP;
Abstract
A laser tracking interferometer directs a laser beam to a retroreflector serving as an object to be measured to sense a displacement of the retroreflector using interference with a laser beam back reflected from the retroreflector. The laser tracking interferometer includes: a reference sphere; a carriage that rotates about a center of the reference sphere; a laser interferometer; a displacement gage for providing a displacement signal corresponding to a relative displacement between the reference sphere and the displacement gage; a data processing apparatus for computing a displacement of the retroreflector; a position sensitive detector for providing a position signal corresponding to deviation of a laser beam; and a controller for controlling rotation of the carriage based on the position signal so that the amount of deviation becomes zero.