The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 17, 2008
Filed:
Mar. 01, 2006
Applicants:
Zhong Dong, San Jose, CA (US);
Chiliang Chen, Sunnyvale, CA (US);
Ching-hwa Chen, Milpitas, CA (US);
Inventors:
Zhong Dong, San Jose, CA (US);
Chiliang Chen, Sunnyvale, CA (US);
Ching-Hwa Chen, Milpitas, CA (US);
Assignee:
Promos Technologies Pte. Ltd., Singapore, SG;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/31 (2006.01); H01L 21/469 (2006.01);
U.S. Cl.
CPC ...
Abstract
In-situ steam generation (ISSG) is used to reduce the nitrogen concentration in silicon and silicon oxide areas.