The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7387951 B1

PDF
Full Text
Expired
Date of Patent:
Jun. 17, 2008

Filed:

Mar. 21, 2005
Applicants:

Masayuki Yamamoto, Osaka, JP;

Saburo Miyamoto, Mie-ken, JP;

Inventors:

Masayuki Yamamoto, Osaka, JP;

Saburo Miyamoto, Mie-ken, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

The invention relates to a semiconductor wafer dicing method of dicing a semiconductor wafer along parting lines into chips. The semiconductor wafer in which parting lines along which the semiconductor wafer is diced into chips are formed is held by an adhesive tape. By radially drawing the adhesive tape in a state where the chips in the semiconductor wafer are not parted from each other, the chips are parted from each other and clearances among the chips are extended.


Find Patent Forward Citations

Yamamoto, Masayuki. (2008). Method of dicing semiconductor wafer into chips, and apparatus using this method (U.S. Patent No. 7387951). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7387951

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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