The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 10, 2008
Filed:
Jun. 02, 2006
Guohai Zhang, Singapore, SG;
Kay-ming Lee, Singapore, SG;
Lu-ying Du, Singapore, SG;
Jui-chun Kuo, Taipei Hsien, TW;
Guohai Zhang, Singapore, SG;
Kay-Ming Lee, Singapore, SG;
Lu-Ying Du, Singapore, SG;
Jui-Chun Kuo, Taipei Hsien, TW;
United Microelectronics Corp., Hsinchu, TW;
Abstract
A data analysis method for an integrated circuit process is described, for analyzing the results of at least an in-line quality test, a product test and a yield test done to the products of the IC process. The products are divided into a normal group and an abnormal group based on the result of the in-line quality test, and are divided into a qualified group and an unqualified group based on the result of the yield test. A categorization step is performed to define the intersection of the unqualified group and the normal group as a first problematic group and to define the intersection of the unqualified group and the abnormal group as a second problematic group. By analyzing one or both of the two problematic groups, the major yield killer can be identified so that process modification can be made accordingly to improve the yield.